| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device capable of performing an accurate inspection in a short time when images in illumination patterns of a plurality of kinds during one-way movement of a stage. SOLUTION: The inspection device comprises a moving mechanism 7 for moving a printed board 8, an illumination control means 91 for radiating light to the printed board 8 by switching an irradiation pattern A and an illumination pattern B in a minute time interval during one-way continuous movement by the moving mechanism 7, a light receiving means 92 for receiving, with a line sensor 6, a reflected image from the printed board 8 irradiated by the illumination control means 91, and a determining means 94 for determining the goodness/badness of the printed board 8 based on the image received by the light receiving means 92. The image by the switched illumination pattern is stored in the same region of a memory 90 until the movement of the stage 70 is completed, and then the image is decomposed every illumination pattern and determination processing of each image is performed. COPYRIGHT: (C)2006,JPO&NCIPI
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