| 摘要 |
An elastic boundary wave device includes a first piezoelectric substrate (2), IDTs (3) arranged thereon, a first dielectric film (5) having a smoothed surface that covers the IDTs, a second substrate (6) that is a silicon-based substrate, and a second dielectric film (7) provided on a main surface of the second substrate. The smoothed surface of the first dielectric surface and a surface of the second dielectric film (7) are joined together. |
