MOLD AND ITS MANUFACTURING METHOD, AND METHOD FOR FORMING PATTERN

摘要

PROBLEM TO BE SOLVED: To provide a mold which can accurately form a recessed and protruded pattern having a nanosize, and also excellently transfer to form to the part to be processed; and its manufacturing method. SOLUTION: The method comprises a process in which a master mold 30 having the recessed and protruded pattern is pressed on the surface of a metal part 3a having a surface of an arithmetical mean degree of roughness Ra of 100 nm or smaller to transfer the recessed and protruded pattern 4 to the metal part 3a. COPYRIGHT: (C)2006,JPO&NCIPI