| 摘要 |
An electrostatic actuator includes a stator that includes a stator-side electrode group including a plurality of electrodes, a mover that includes a mover-side electrode group including a plurality of electrodes and that can move in a predetermined movement direction, this plurality of electrodes opposing the electrodes in the stator-side electrode group, a guide instrument that guides the mover, and a driving signal supply unit that generates driving signals and applies the driving signals between the stator-side electrode group and the mover-side electrode group. In one electrode group of these electrode groups, the electrodes and gaps have the same length and are alternately disposed in the movement direction, and the other electrode group includes a first group and a second group alternately disposed in the movement direction, each of the first and second groups including an electrode and a gap.
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