| 摘要 |
PROBLEM TO BE SOLVED: To provide a seed chuck for pulling a single crystal, with which the contamination caused by a metal constituting the seed chuck can be reduced and which has high strengths and toughness of the metal. SOLUTION: This seed chuck 20 is connected to a hanging wire 10 or rod of an apparatus for pulling the single crystal by a Czochralski method and holds a seed crystal 4. The seed chuck 20 has at least a metal holder 1 made of the metal, connected to the hanging wire 10 or rod, a seed holder 2 for holding the seed crystal 4, which is linked to a lower part of the metal holder 1, and a holder heat-insulating tube 6 which is attached to the outer peripheral part of the seed holder 2 and suppresses temperature rise of the metal holder 1 by cutting radiation heat. The holder heat-insulating tube 6 is provided at an interval without being touched on the outer surface of the metal holder 1. COPYRIGHT: (C)2006,JPO&NCIPI
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