RETICLE BOX CLEANER,申请号KR20030077394-传众专利搜索

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发明名称	RETICLE BOX CLEANER
摘要
申请公布号	KR100578132(B1)	申请公布日期	2006.05.10
申请号	KR20030077394	申请日期	2003.11.03
申请人		发明人
分类号	H01L21/027;B08B5/00;B08B5/02;B08B11/00;G03F7/20	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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