发明名称 |
MICRO-FORCE SENSING SYSTEM |
摘要 |
<p>An improved microforce sensing system is provided. The microforce sensing system includes: a force sensor configured to detect a contact force exerted on a contact tip of the cantilever and operable to generate a signal indicative of the contact force, where the cantilever is constructed from a polyvinylidene fluoride material in the form of a substantially rectangular plate or other suitable shapes; and a processing circuit adapted to receive the signal from the force sensor and operable to determine the contact force exerted on the tip by integrating the signal from the force sensor.</p> |
申请公布号 |
EP1647032(A1) |
申请公布日期 |
2006.04.19 |
申请号 |
EP20040777956 |
申请日期 |
2004.07.08 |
申请人 |
BOARD OF TRUSTEES OPERATING MICHIGAN STATE UNIVERSITY |
发明人 |
SALEM, FATHI, M.;XI, NING;SHEN, YANTAO |
分类号 |
G01Q70/16;(IPC1-7):G12B21/02;H01L41/09 |
主分类号 |
G01Q70/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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