发明名称 MICRO-FORCE SENSING SYSTEM
摘要 <p>An improved microforce sensing system is provided. The microforce sensing system includes: a force sensor configured to detect a contact force exerted on a contact tip of the cantilever and operable to generate a signal indicative of the contact force, where the cantilever is constructed from a polyvinylidene fluoride material in the form of a substantially rectangular plate or other suitable shapes; and a processing circuit adapted to receive the signal from the force sensor and operable to determine the contact force exerted on the tip by integrating the signal from the force sensor.</p>
申请公布号 EP1647032(A1) 申请公布日期 2006.04.19
申请号 EP20040777956 申请日期 2004.07.08
申请人 BOARD OF TRUSTEES OPERATING MICHIGAN STATE UNIVERSITY 发明人 SALEM, FATHI, M.;XI, NING;SHEN, YANTAO
分类号 G01Q70/16;(IPC1-7):G12B21/02;H01L41/09 主分类号 G01Q70/16
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