| 摘要 |
PROBLEM TO BE SOLVED: To provide a new conveying method for conveying, while treating an object to be treated, and to provide a conveying device, and a washing system. SOLUTION: The conveying apparatus 1 comprises a convey passage 2 for changing the shape of a conveying surface 2S; a first actuator 21 for generating a first advance wave in a conveying direction X on the conveying surface 2S; and a second actuator 22 for generating a second advance wave in a rotary directionθ1 on the conveying surface 2S. Both the first and second actuators 21, 22 have a function of performing more expansion/contraction compared with pressure fluid which is supplied from a pressure fluid supply source 4. COPYRIGHT: (C)2006,JPO&NCIPI
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