发明名称 MAGNETOSTRICTIVE CONTROLLER
摘要 <p><P>PROBLEM TO BE SOLVED: To make it possible to control the position of the high accurate and high speed response of a magnetostrictive actuator by preventing the phase delay and controlling even a low frequency noise and an offset component. <P>SOLUTION: The displacement of a mobile yoke 18 of the magnetostrictive actuator E1 is detected by a displacement detector 20 and a current command 1 is changed by feeding back into a position controller 8. The position control system to prevent the offset, the current control system to feed back the detected value of the current detector 5 and the magnetostrictive control system to prevent the phase delay correcting the magnetic flux by detecting the change of magnetic flux with a search coil 17 are provided, which materializes the magnetostrictive actuator to respond at a high speed according to the displacement command. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p>
申请公布号 JP2006077898(A) 申请公布日期 2006.03.23
申请号 JP20040263214 申请日期 2004.09.10
申请人 CANON INC 发明人 EZAWA MITSUHARU
分类号 F16D48/06;H01L41/12 主分类号 F16D48/06
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