发明名称 MICROSTRUCTURE AND MANUFACTURING PROCESS THEREOF
摘要 PROBLEM TO BE SOLVED: To attain a microstructure which has a micro continuous structure that has high throughput and has a shape that is processed with high accuracy and with high throughput. SOLUTION: The microstructure has at least one columnar structure and a slit-forming portion which extends in a side-face direction from a side face of the column-shaped structure, wherein the slit-forming portion has a plurality of slits aligned in parallel, at an interval of 20 to 1,000 nm, in a direction along the center axis of the columnar structure. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006072343(A) 申请公布日期 2006.03.16
申请号 JP20050225409 申请日期 2005.08.03
申请人 NEC CORP 发明人 IGUCHI NORIYUKI;NAKADA MASABUMI;IIDA KAZUHIRO
分类号 G02B5/30;G02B5/18 主分类号 G02B5/30
代理机构 代理人
主权项
地址