| 摘要 |
PROBLEM TO BE SOLVED: To provide an oxidation method of a material to be treated in which generation of a facet is prevented by rounding a corner of a bottom in addition to a corner of a shoulder of a trench so that the corners are formed into a shape of a curved surface. SOLUTION: In an oxidation method of a material to be treated; in which a material to be treated W, on the surface of which trenches 4 are formed, is stored in a treatment chamber 22 that is allowed to be evacuated, then an oxidizing gas and a reducing gas are supplied into the treatment chamber, and then a surface of the material to be treated is oxidized in an atmosphere having oxygen activated species and hydroxyl activated species generated by reacting both of the gases; temperature within the treatment chamber is set to be 900°C or lower during the oxidation. Thus, a corner of a bottom is rounded in addition to a corner of a shoulder of a trench, thereby generation of a facet is prevented. COPYRIGHT: (C)2006,JPO&NCIPI
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