发明名称 Device for transferring a pattern to an object
摘要 A device ( 4 ) for transferring a pattern to an object ( 2 ). The invention relates especially to production of micro and nanostructures. The device comprises an alignment means ( 10 ) arranged in connection with a first contacting means ( 7 ) for controlling the motion of the first stamp ( 8 ) in a direction perpendicular to the pressing direction (A), and a second contacting means ( 11 ) having a second stamp ( 12 ) adapted to imprint a second pattern in the second surface ( 6 ) of the object ( 2 ), and a pressing means ( 9 ) further adapted to press the second stamp ( 12 ) into contact with the second surface ( 6 ) of the object ( 2 ) in the pressing direction (A). Hereby is obtained a device of a simple design, which has a high accuracy of the alignment of the stamps in relation to the object.
申请公布号 US2006006580(A1) 申请公布日期 2006.01.12
申请号 US20050525034 申请日期 2005.02.17
申请人 OBDUCAT AB 发明人 OLSSON LENNART;ANDERSSON PETER
分类号 B28B11/08;B81C99/00;B29C59/00;G03F7/00;G11B5/855;H01L21/027 主分类号 B28B11/08
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