发明名称 |
SHEET-TYPE TREATING DEVICE |
摘要 |
This invention relates to a thermal processing method including: a placing step of placing an object to be processed onto a stage arranged in aprocessing container that can be vacuumed; and a heating step of heating the object to be processed to a predetermined temperature. The object to be processed is heated under a state in which a temperature distribution is maintained in such a manner that a temperature at a central portion of the object to be processed is high while a temperature at a peripheral portion of the object to be processed is low, during at least a part of the heating step. <IMAGE> |
申请公布号 |
EP1367637(A4) |
申请公布日期 |
2006.01.04 |
申请号 |
EP20020712428 |
申请日期 |
2002.02.18 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
KASAI, SHIGERU;MIYASHITA, HIROYUKI |
分类号 |
H01L21/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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