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经营范围
发明名称
Plasma processing apparatus
摘要
申请公布号
EP0759632(B1)
申请公布日期
2005.12.28
申请号
EP19960113196
申请日期
1996.08.16
申请人
TOKYO ELECTRON LIMITED
发明人
HAMA, KIICHI;HONGOH, TOSHIAKI;KURIKI, YASUYUKI
分类号
H01J37/32;(IPC1-7):H01J37/32
主分类号
H01J37/32
代理机构
代理人
主权项
地址
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