SCANNING ELECTRON MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide a low cost electrode structure having improved the yield of current absorption, wherein operability in observation of an image in the configuration of instruments is also improved. SOLUTION: In a simplified electrode structure, a secondary electron collector electrode for a secondary electron detector used in observation in a high vacuum condition is also used in a low vacuum condition. In the electrode structure improving the yield of current absorption, a ring electrode placed adjacent to a specimen is arranged fixed to a micro moving stage. The improvement of the operability is performed by providing a function to automatically setting an applying voltage value and a specimen chamber vacuum degree to make the yield of current absorption to become the maximum yield. COPYRIGHT: (C)2006,JPO&NCIPI