发明名称 PARTITIONING METHOD OF CRYSTAL
摘要 PROBLEM TO BE SOLVED: To finely partition a plate type hexagonal system crystal into a plurality of desired rectangles on the surface (c) thereof, with respect to the partitioning method of the crystal into a plurality of crystals so that the partitioned configuration of the crystal on the surface (c) of the substantially plate type hexagonal system crystal becomes substantially rectangular. SOLUTION: An xyz orthogonal coordinate shown in a diagram is fixed to the crystal of sapphire in the diagram, and the z-axis coincides with a c-axis while the longitudeϕof the normal vector of one surface (r) shown by slanting lines is 45°. In scribing treatment, the direction and sense are important, and when the scribing is applied in a sense (ϕ=30°, 60°), in which the normal vector of the surface (r) is promixate to the longitude of the surface (r), it is hardly divided finely. However, when the scribing is applied in respective positive senses of x-axis and y-axis, the crystal to be partitioned can be finely divided into desired rectangles. There are three kinds of symbols in the diagram and each of them means respectively as follows.○: breaking can be effected easily and finely along the scribe line.Δ: breaking can be effected easily so often along the scribe line. X: breaking can not be effected along the scribe line. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2005332892(A) 申请公布日期 2005.12.02
申请号 JP20040148318 申请日期 2004.05.18
申请人 TOYODA GOSEI CO LTD 发明人 SHIRAKI TOMOHARU;ONISHI MASARU;USHIDA YASUHISA
分类号 H01L21/301;(IPC1-7):H01L21/301 主分类号 H01L21/301
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