摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and a method for heat treating a fluoride crystal, which are effective for heat treatment for removing strain of a large diameter, heavy fluoride crystal and provided for obtaining a low strain, high accuracy large diameter fluoride crystal. SOLUTION: The apparatus has such a constitution that a member for alleviating stress in the crystal is arranged on the bottom of the crystal between a crucible for accommodating the fluoride crystal and the fluoride crystal. COPYRIGHT: (C)2006,JPO&NCIPI
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