发明名称 APPARATUS AND METHOD FOR HEAT TREATING FLUORIDE CRYSTAL
摘要 PROBLEM TO BE SOLVED: To provide an apparatus and a method for heat treating a fluoride crystal, which are effective for heat treatment for removing strain of a large diameter, heavy fluoride crystal and provided for obtaining a low strain, high accuracy large diameter fluoride crystal. SOLUTION: The apparatus has such a constitution that a member for alleviating stress in the crystal is arranged on the bottom of the crystal between a crucible for accommodating the fluoride crystal and the fluoride crystal. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2005330122(A) 申请公布日期 2005.12.02
申请号 JP20040147567 申请日期 2004.05.18
申请人 CANON INC 发明人 ASAMI MASAYOSHI
分类号 G02B1/02;C30B29/12;C30B33/02;(IPC1-7):C30B29/12 主分类号 G02B1/02
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