发明名称 Electrical test device
摘要 An electrical test device, in particular for testing wafers, having a contact head, which is associated with the test object and is provided with pin-shaped contact elements that are arrayed to form a contact pin arrangement. An electrical connection apparatus, including contact faces which are in touching contact with ends of the contact elements which face away from the test object. A centering device, which permits only radial play for thermal expansion by sliding guides, for centrally aligning the contact head and the connection apparatus with respect to one another.
申请公布号 US2005253608(A1) 申请公布日期 2005.11.17
申请号 US20050127901 申请日期 2005.05.12
申请人 BOHM GUNTHER 发明人 BOHM GUNTHER
分类号 G01R31/26;G01R1/073;G01R1/44;H01L21/66;(IPC1-7):G01R31/02 主分类号 G01R31/26
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