发明名称 |
METHOD FOR PRODUCING COATING FILM WITH USE OF AEROSOL, PARTICULATE THEREFOR, COATING FILM AND COMPOSITE MATERIAL |
摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing a coating film with the use of aerosol, which forms the coating film of adequate quality at a high film-forming rate. SOLUTION: This production method comprises: forming the aerosol by mixing particulates which are mainly made of a brittle material and have a 50% average diameter (D50) of 100 to 300 nm on a number base, with a carrier gas; spraying the aerosol onto the surface of a substrate to collide the particulates with the substrate; and pulverizing or deforming the particulates by the collision to form the coating film on the substrate. COPYRIGHT: (C)2006,JPO&NCIPI
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申请公布号 |
JP2005314804(A) |
申请公布日期 |
2005.11.10 |
申请号 |
JP20050079680 |
申请日期 |
2005.03.18 |
申请人 |
TOTO LTD |
发明人 |
IWAZAWA JUNICHI;HATONO HIRONORI;ASHIZAWA HIROAKI |
分类号 |
C23C24/04;H01L21/205;H01L21/316;(IPC1-7):C23C24/04 |
主分类号 |
C23C24/04 |
代理机构 |
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