METHOD OF MANUFACTURING MICROSTRUCTURE, MICROSTRUCTURE, WAVE LENGTH VARIABLE LIGHT FILTER AND MICROMIRROR

摘要

PROBLEM TO BE SOLVED: To provide a microstructure manufacturing method capable of manufacturing a microstructure without damaging in a manufacturing process; the microstructure; a wave length variable light filter; and a micromirror. SOLUTION: A movable body 21a is formed by forming a predetermined opening pattern 24 on a movable part substrate 21 by dry etching, after eliminating a pressure difference between the glass substrate 11 side of the movable part substrate 21 and its opposite side by forming a pressure releasing opening part 25 on the movable part substrate 21 joined to a glass substrate 11, to thereby prevent damage to the microstructure in the manufacturing process caused by the pressure difference. COPYRIGHT: (C)2006,JPO&NCIPI