发明名称 Quartz glass crucible for pulling up silicon single crystal and method for producing the same
摘要 An object of the invention is to provide a quartz glass crucible reduced in the generation of vibration occurring on the surface of a silicon melt and free from the generation of rough surface and cristobalite spots, yet capable of pulling up single crystal silicon stably and at high yield even in long-term operations; it is also an object to provide a method for producing the same. In a quartz glass crucible for pulling up single crystal silicon comprising a crucible base body having a bottom part and a straight shell part with an inner layer provided to the inner surface thereof, the quartz glass crucible is characterized by that said inner layer comprises a synthetic quartz glass layer from the lowest end to at least a height of 0.25 H; a naturally occurring quartz glass layer or a mixed layer of naturally occurring quartz glass and synthetic quartz glass extended in a range of from at least 0.5 H to 0.8 H; and one selected from a synthetic quartz glass layer, a naturally occurring quartz glass layer, and a mixed quartz glass layer of naturally and synthetic quartz glass for the rest of the inner layer, wherein H represents the height from the lowest end of the bottom part to the upper end plane of the shell part. It also provides a method for producing the quartz glass crucible above.
申请公布号 US2005235907(A1) 申请公布日期 2005.10.27
申请号 US20050523319 申请日期 2005.01.31
申请人 OHAMA YASUO;TOGAWA TAKAYUKI 发明人 OHAMA YASUO;TOGAWA TAKAYUKI
分类号 C03B20/00;C30B15/10;C30B29/06;(IPC1-7):C30B35/00 主分类号 C03B20/00
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