| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method and an inspection equipment for inspecting semiconductor devices such as a semiconductor laser chip in a short time, while securing high reliability. SOLUTION: When the current of two or more current values is impressed to a semiconductor device, the characteristic values showing the state of the semiconductor device are measured by the semiconductor device inspection method. The inspection method comprises a measuring process for measuring the characteristic values showing the state of the semiconductor device, by impressing the current of the set-up current values; a setting process for calculating the current value of the current to be impressed to a semiconductor device successively for updating set-up on the basis of the characteristic values measured by the measuring process; and a repetition process for repeating the measuring process and the setting process until a predetermined condition is fulfilled. COPYRIGHT: (C)2006,JPO&NCIPI
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