发明名称 |
Process for transferring a layer of strained semiconductor material |
摘要 |
The invention relates to a process for producing an electronic structure that includes a thin layer of strained semiconductor material from a donor wafer. The donor wafer has a lattice parameter matching layer that includes an upper layer of a semiconductor material having a first lattice parameter and a film of semiconductor material having a second, nominal, lattice parameter that is substantially different from the first lattice parameter and that is strained by the matching layer. This process includes transfer of the film to a receiving substrate. The invention also relates to the semiconductor structures that can be produced by the process.
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申请公布号 |
US6953736(B2) |
申请公布日期 |
2005.10.11 |
申请号 |
US20030615259 |
申请日期 |
2003.07.09 |
申请人 |
S.O.I.TEC SILICON ON INSULATOR TECHNOLOGIES S.A. |
发明人 |
GHYSELEN BRUNO;BENSAHEL DANIEL;SKOTNICKI THOMAS |
分类号 |
H01L21/301;H01L21/762;H01L29/10;(IPC1-7):H01L21/30 |
主分类号 |
H01L21/301 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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