ELECTRON EMITTING DEVICE MANUFACTURING METHOD AND ELECTRON EMITTING DEVICE

摘要

A method for manufacturing an electron emitting device composed of an electron emitting element wherein a lower electrode (11), an electron supplying layer (12), an insulating layer (13) and an upper electrode (15) are successively stacked on a substrate. The method includes a micro mask (MM) forming process wherein a plurality of micro masks are formed on the electron supplying layer. The micro mask is provided with a supporting part (P) protruding in a normal line direction of a substrate, and a main mask part (M) protruding from the supporting part in a direction vertical to a normal line direction of the substrate. An electron emission device having the micro mask remained is also provided. By using the micro mask having the supporting part and the main mask part, the electronic emission element arranged with finely filled arrangement and regularity, which could not have been obtained by methods employing fine particles, and an effective width of a bottom part of the supporting part and an effective width of the main mask can be independently decided. Therefore, the micro mask having higher mask effects and less destruction possibilities compared with methods using a reversely tapered blocks is provided.