| 发明名称 |
FLEXIBLE MOLD, METHOD OF MANUFACTURING SAME AND METHOD OF MANUFACTURING FINE STRUCTURES |
| 摘要 |
A flexible mold (10) having a mold layer (11) that is provided on the surface thereof with a groove pattern (4) of specified shape and size, is constructed such that the mold layer contains a lithium salt of an organic fluorine compound as an antistatic agent. |
| 申请公布号 |
EP1581375(A1) |
申请公布日期 |
2005.10.05 |
| 申请号 |
EP20030796863 |
申请日期 |
2003.12.10 |
| 申请人 |
3M INNOVATIVE PROPERTIES COMPANY |
发明人 |
SUGIMOTO, TAKAKI |
| 分类号 |
B29C33/40;B29C33/42;B29C33/50;B29L11/00;H01J9/02;H01J9/24;H01J11/02;H01J11/22;H01J11/34;H01J11/36;(IPC1-7):B29C33/40;C08K5/00;H01J19/02 |
主分类号 |
B29C33/40 |
| 代理机构 |
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代理人 |
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