| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a stage device controlling a yaw angle of a movable base to keep an attitude of the movable base a regular attitude, and capable of miniaturizing a footprint. <P>SOLUTION: In this stage device 1, the movable base 3 is supported by a non-contact bearing 4 or a fluid bearing such that the movable base 3 can move in orthogonal two-axis directions to a fixed part 2, and the movable base 3 is driven by linear motors 5, 6 and is positioned in an arbitrary position. The movable base 3 has one two-dimensional linear scale 7, and the fixed part 2 is installed with two two-dimensional linear sensors 8, 8 at an interval in a travel direction of the linear motor 5. The two two-dimensional linear sensors 8, 8 detect displacement of the movable base 3 in a direction orthogonal to the travel direction of the linear motor 5, and detect the yaw angle of the movable base 3 on the basis of the displacement. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
