| 发明名称 |
Titanium stripping solution |
| 摘要 |
A titanium stripping solution comprises an aqueous solution of pH 5 or lower containing a fluorine compound and a metal ion having a reducing power, which enables etching of titanium at a high etching rate by the fluorine compound with exhibiting an effect of suppressing corrosion of other metal(s).
|
| 申请公布号 |
US2005194564(A1) |
申请公布日期 |
2005.09.08 |
| 申请号 |
US20050045310 |
申请日期 |
2005.01.31 |
| 申请人 |
MELTEX INC. |
发明人 |
FUJITA YASUJI;NOZAKI TAKASHI;ISHINO YOSHIHIRO |
| 分类号 |
C23F1/00;C09K13/00;C23F1/26;H01L21/308;(IPC1-7):C09K13/00 |
主分类号 |
C23F1/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
