Optical waveguide microcantilever with differential output and associated methods of cantilever sensing

摘要

A microcantilever sensing system includes a waveguide cantilever that permits an optical signal to propagate through an endface of the cantilever. The propagated signal is received by a receiver waveguide across a gap from the cantilever. The receiver waveguide provides the optical signal to a differential beamsplitter. The signal is differentially split according to the position of the optical signal incident upon the receiving waveguide. A method of determining a deflection waveguide microcantilever is also disclosed. An optical signal is transmitted from the endface of a waveguide microcantilever and received by the receiver waveguide. The optical signal is differentially split and then each split signal is compared to determine beam deflection. A method of fabricating a microcantilever sensor provides a differential beamsplitter in optical communication with a waveguide cantilever.