VACUUM FILM DEPOSITION APPARATUS,申请号KR19990043798-传众专利搜索

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发明名称	VACUUM FILM DEPOSITION APPARATUS
摘要
申请公布号	KR100508744(B1)	申请公布日期	2005.08.17
申请号	KR19990043798	申请日期	1999.10.11
申请人		发明人
分类号	B01J3/00;H01L21/205;B01J3/02;C23C14/34;H01L21/00;(IPC1-7):H01L21/205	主分类号	B01J3/00
代理机构		代理人
主权项
地址

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