发明名称 |
MODULAR SUBSTRATE MEASUREMENT SYSTEM |
摘要 |
<p>A substrate measurement system including a measurement chamber and a substrate handling chamber possessing a substrate transfer and a substrate container interface arranged to receive a substrate to container. The handling chamber contains a first interface to connect the measurement chamber and the measurement chamber contains a second interface to connect the handling chamber. The transfer means is arranged to transfer substrates between the container and the measurement chamber through the handling chamber, in which system a second measurement chamber is provided, having the same second interface as the first measurement chamber to replace latter chamber.</p> |
申请公布号 |
EP1273031(B1) |
申请公布日期 |
2005.08.10 |
申请号 |
EP20010923985 |
申请日期 |
2001.04.12 |
申请人 |
NANOPHOTONICS AG;RECIF SA |
发明人 |
ABRAHAM, MICHAEL;RAAIJMAKERS, IVO, J., M., M.;GAUDON, ALAIN;ASTEGNO, PIERRE |
分类号 |
B65G1/00;H01L21/00;H01L21/02;H01L21/66;H01L21/67;H01L21/673;H01L21/677;H01L21/68;(IPC1-7):H01L21/00 |
主分类号 |
B65G1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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