A METHOD OF IMPLANTING A SUBSTRATE AND AN ION IMPLANTER FOR PERFORMING THE METHOD,申请号KR20050002438-传众专利搜索

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发明名称	A METHOD OF IMPLANTING A SUBSTRATE AND AN ION IMPLANTER FOR PERFORMING THE METHOD
摘要
申请公布号	KR20050074309(A)	申请公布日期	2005.07.18
申请号	KR20050002438	申请日期	2005.01.11
申请人		发明人
分类号	H01J37/317;G01N23/00;H01J37/304;H01L21/00;H01L21/26;H01L21/265;H01L21/42;(IPC1-7):H01J37/317	主分类号	H01J37/317
代理机构		代理人
主权项
地址

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