| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a heat type sensor which is reduced in working dispersions, in wiring part due to etching. <P>SOLUTION: The heat-type flow rate sensor 100 is provided with a substrate 10, a membrane 20 as a thin part formed on the substrate 10, and a wiring part 30 including a heater 31 formed on the membrane 20 and by patterning the same material. A dummy wiring part 40 which is not electrically connected with the wiring part 30 is provided, with at least a part of the wiring part non-forming region so that the widths of the wiring non-forming region excepting for the forming region of the wiring part 30 are all substantially equal. By providing the dummy wiring part 40, even in the case that all widths of the wiring part non-forming region cannot be set substantially the same by patterning the wiring part 30 in design, all the widths of the wiring part non-forming region can be set substantially equal. Therefore, wraparound condition of light to resist at the time of exposure becomes constant, and so fabrication scattering of each wiring part 30 by etching is reduced. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
