发明名称 Flash memory cell and fabrication method
摘要 Memory cells, formed as trench transistors, having a respective floating gate electrode and a control gate electrode at a trench wall above a channel region between doped regions for source and drain are provided with a gate electrode arranged in a further trench, via which gate electrode the channel region present in a semiconductor ridge between the trenches can additionally be driven.
申请公布号 US2005146940(A1) 申请公布日期 2005.07.07
申请号 US20040991342 申请日期 2004.11.09
申请人 INFINEON TECHNOLOGIES AG 发明人 HOFMANN FRANZ;SPECHT MICHAEL
分类号 G11C16/04;H01L21/28;H01L21/8247;H01L21/84;H01L27/115;H01L27/12;H01L29/788;H01L29/792;(IPC1-7):H01L21/00 主分类号 G11C16/04
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