VACUUM SUCTION HEAD, AND VACUUM SUCTION DEVICE AND TABLE USING THE SAME

摘要

A vacuum suction head capable of being used also for a large-sized liquid crystal display panel and capable of reliably sucking an object to be sucked even the object has undulation or flexure. The suction head has a shaft, the shaft holds a suction pad, and gas is charged into and discharged from the suction pad through a suction hole. A casing holds the shaft, through first and second springs, so as to be movable in the axial direction. Since the suction pad is elastically supported by the springs, the suction pad can reliably suck an object to be sucked having undulation or flexure. The vacuum suction head can be used for a vacuum suction device and a working table.