| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an infrared light source with an improved emission efficiency of infrared rays. <P>SOLUTION: The infrared light source 100 is provided with a membrane part 20 as a membrane floating over an upper face opening 11a relative to a substrate 10, a resistor element 15 disposed in the membrane part 20 and heated by energization, and high emissive membrane 30 disposed on the membrane part 20, having an infrared emission rate larger than that of the resistor element 15 and emitting infrared rays by receiving heat from the resistor element 15. The resistor element 15 and the high emissive membrane 30 are disposed in only a region in which the membrane part 20 is formed, and thermally isolated from the substrate 10. The heat quantity propagating to the substrate 10 is decreased. The high emissive membrane 30 efficiently emits the infrared rays by receiving the heat from the resistor element 15. Accordingly, the infrared emission efficiency of an infrared light source 100 is improved than a conventional invention. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
