Work working method and apparatus, cassette, and unit for printing apparatus

摘要

In a working method of performing work on a workpiece, a plurality of work chambers corresponding to work steps for the workpiece are consecutively arrayed, and a cleanliness with respect to dust particles is independently controlled in each of the work chambers. The workpiece is transferred to the respective work chambers, and working is performed in each of the work chambers in which a cleanliness is maintained below a predetermined cleanliness corresponding to the type of work on the workpiece.