发明名称 Multiple short local electrical connections for selective linkage of integrated circuit elements comprise masked selective humid attack of deposited metal
摘要 <p>An electric connection selectively linking elements (10, 12) on an integrated circuit substrate (28) comprises: (a) realizing the elements on a substrate of which a part of the surface is made of a first material, depositing, on the substrate and the elements, a second conducting material (44, 46) that is able to create a reaction with the first material to form a conducting material on the substrate surface; (b) treating the substrate to produce the reaction; and (c) realizing a selective withdrawal of the second material that has not reacted with the first material, in order to leave some of the second material according to a pattern that corresponds with at least a part of the connection. An independent claim is also included for an integrated circuit incorporating the above electrical connections.</p>
申请公布号 FR2860920(A1) 申请公布日期 2005.04.15
申请号 FR20030011987 申请日期 2003.10.14
申请人 STMICROELECTRONICS SA 发明人 NIEL STEPHAN
分类号 H01L21/285;H01L21/768;(IPC1-7):H01L21/768;H01L23/535 主分类号 H01L21/285
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