| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid droplet discharge device capable of developing high work efficiency when drying treatment is performed in a manufacturing method for a multilayered wiring film structure to manufacture the film structure at a low cost, a manufacturing method for the film structure using the device, the film structure, a device and an electronic device. SOLUTION: The liquid droplet discharge device 10 is constituted so as to drip a liquid material containing a pattern forming material on a substrate P to form a predetermined pattern on the substrate P and equipped with predryers 80 and 80' for applying gas, the temperature of which is adjusted to a predetermined temperature, to the liquid material on the substrate P. The predryers 80 and 80' are arranged so that the gas is not blown in the flying region of the liquid material until the liquid material reaches the substrate P from the liquid droplet discharge device 10. COPYRIGHT: (C)2005,JPO&NCIPI |
