发明名称 CHEMICAL VESSEL
摘要 A chemical container is provided to reduce fabrication costs and to replace easily a damaged part with a new one by manufacturing the container using an assembling process instead of a welding process. A chemical container(100) includes a tube, a pair of fitting blocks, a plurality of sealing parts, and at least one or more fixing member. The tube(110) includes a storage space, a supply port(112) and an exhaust port. The pair of fitting blocks(120) are used for connecting a chemical supply line(1) to the supply port or exhaust port of the tube. The plurality of sealing parts(130) are installed at a connecting portion between the fitting block and the tube in order to keep airtightness. The fixing member(140) is used for fixing the fitting blocks to each end of the tube.
申请公布号 KR20050032181(A) 申请公布日期 2005.04.07
申请号 KR20030068195 申请日期 2003.10.01
申请人 DONGBUANAM SEMICONDUCTOR INC. 发明人 SHIM, MOON HAN
分类号 H01L21/3063;(IPC1-7):H01L21/306 主分类号 H01L21/3063
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