OPTICAL ELEMENT FOR DISPLAY

摘要

In order to provide an antireflection film having a uniform thickness and exhibiting excellent adhesion to a base (4), a plasma discharge chamber (12) having a gas supply port (14) for supplying gas G, a stage electrode (11), a prismatic electrode (13) and the like, is employed. The stage electrode (11) is applied with a first high frequency electric field of frequency omega1 and field intensity V1, and the prismatic electrode (13) is applied with a second high frequency electric field of frequency omega2 and field intensity V2. Assuming the intensity of the break-down electric field is IV, following conditions are satisfied; V1 >= IV > V2 or V1 > IV >= V2, omega2 > omega1.