| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a defect inspection method for performing highly accurate defect inspection by determining whether an inspecting object is defective or not. <P>SOLUTION: A defect image is prepared by Fourier-transforming defect frequency data. The defect image is processed to calculate feature values each expressing a feature as a defect. Then, an inspection feature image is prepared in which the calculated feature value of each block is used as the luminance value of each pixel. The connectivity of the respective pixels of the feature image is evaluated to determine whether the inspecting object is defective or not. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
