VERTICAL TYPE HEAT TREATMENT APPARATUS,申请号KR19980705030-传众专利搜索

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发明名称	VERTICAL TYPE HEAT TREATMENT APPARATUS
摘要
申请公布号	KR100461292(B1)	申请公布日期	2005.02.28
申请号	KR19980705030	申请日期	1998.06.29
申请人		发明人
分类号	H01L21/22;(IPC1-7):H01L21/22	主分类号	H01L21/22
代理机构		代理人
主权项
地址

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