| 摘要 |
PROBLEM TO BE SOLVED: To provide an organic light-emitting element capable of improving reliability by preventing a first electrode from an incorrect shape, and to provide a manufacturing method of the same and a display device. SOLUTION: A first electrode 12 is formed by laminating an adhesion layer 12A, for example, made of titanium (Ti) or ITO (Indium Tin Oxide), a metal layer 12B made of silver (Ag), an alloy containing silver, aluminum (Al), or an alloy containing aluminum, and a work function adjusting layer 12C made of oxide of chromium or ITO, in turn from the side of a substrate 11 in approximately a tapered shape, or more specifically, in a stepped shape with a wire width becoming broader as it is headed toward the substrate side. The first electrode can be exactly formed almost into the tapered-shape by heightening accuracy of patterning by accurately controlling an etching line width by applying a lithography process at every layer with a different etching method and an etching speed from each other, after forming the adhesion layer 12A, the metal layer 12B, and the work function adjusting layer 12C on the substrate 11, successively. COPYRIGHT: (C)2005,JPO&NCIPI
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