发明名称 Very high speed photodetector system using a PIN photodiode array for position sensing
摘要 An apparatus for detecting a centroid of a spot produced by electromagnetic radiation, e.g., optic radiation, using an array of PIN photodiodes serving as photodetectors and being organized in columns and in rows. Vertical connections are used to interconnect the PIN photodiodes in the columns in accordance with a first pattern that interconnects two or more adjacent columns. Horizontal connections are used to interconnect PIN photodiodes in the rows in accordance with a second pattern that interconnects two or more adjacent rows. The first and second patterns of interconnections can include just two adjacent columns and two adjacent rows, respectively and form a checkerboard interconnect pattern. The interconnections are made such that there are no anode connections between the PIN photodiodes in the rows and columns. The apparatus has a processing circuitry for rapidly deriving an X-extent of the centroid from current signals obtained from the columns and a Y-extent of the centroid from current signals obtained from the rows.
申请公布号 US2005006564(A1) 申请公布日期 2005.01.13
申请号 US20040913974 申请日期 2004.08.05
申请人 发明人 SKURNIK DAVID;SPRAGUE RANDALL BRIAN;JONES GEOFFREY HUGH;ABBOTT ERIC CHARLES;LAW WAISIU
分类号 G01J1/42;G02B7/04;H01L27/00;H01L27/144;(IPC1-7):G02B7/04 主分类号 G01J1/42
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