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发明名称
ELECTRONIC COMPONENT HANDLING DEVICE, AND METHOD FOR TEMPERATURE APPLICATION IN ELECTRONIC COMPONENT HANDLING DEVICE
摘要
申请公布号
AU2003242036(A1)
申请公布日期
2005.01.04
申请号
AU20030242036
申请日期
2003.06.04
申请人
ADVANTEST CORPORATION
发明人
HIROTO NAKAMURA
分类号
G01R31/01;G01R31/28;H01L21/00;H01L21/673;(IPC1-7):G01R31/26
主分类号
G01R31/01
代理机构
代理人
主权项
地址
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