发明名称 Field effect transistor using vanadium dioxide layer as channel material and method of manufacturing the field effect transistor
摘要 Provided is a field effect transistor. The field effect transistor includes an insulating vanadium dioxide (VO2) thin film used as a channel material, a source electrode and a drain electrode disposed on the insulating VO2 thin film to be spaced apart from each other by a channel length, a dielectric layer disposed on the source electrode, the drain electrode, and the insulating VO2 thin film, and a gate electrode for applying a predetermined voltage to the dielectric layer.
申请公布号 US2004245582(A1) 申请公布日期 2004.12.09
申请号 US20030749596 申请日期 2003.12.30
申请人 KIM HYUN TAK;KANG KWANG YONG;YOUN DOO HYEB;CHAE BYUNG GYU 发明人 KIM HYUN TAK;KANG KWANG YONG;YOUN DOO HYEB;CHAE BYUNG GYU
分类号 H01L49/00;(IPC1-7):H01L29/76 主分类号 H01L49/00
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