ADJUSTING DEVICE FOR THE PLANARIZATION OF PROBE SETS OF A PROBE CARD
摘要
A system and method allow accurate calculation of probe float through optical free-hanging and electrical planarity measurement techniques. In accordance with an exemplary embodiment, probe float may be determined by acquiring a free-hanging planarity measurement, obtaining a first electrical contact planarity measurement, and calculating probe float using results of the acquiring and the obtaining operations.
申请公布号
WO2004083873(A3)
申请公布日期
2004.12.02
申请号
WO2004US08001
申请日期
2004.03.15
申请人
APPLIED PRECISION, LLC;STROM, JOHN, T.;KRAFT, RAYMOND, H.