IMPRINT DEVICE AND IMPRINT METHOD

摘要

PROBLEM TO BE SOLVED: To provide an imprint device which can transfer the irregular shapes having a concave part of uniform depth over the whole resin layer area. SOLUTION: The imprint device is provided with a nozzle 4 and an air pump, which transfer the irregular shapes to a resist layer R by pressing an irregular part to the resist layer R on a disk-shaped base material D through pressing the other surface of a flexible stamper S on whose one surface the irregular shape is formed; and a movement mechanism for moving the nozzle 4. The nozzle 4 is constituted so that it can press a prescribed part of the other surface of the stamper S by jetting the compressed air supplied by the air pump. The movement mechanism is constituted so that the range in which the press by the nozzle 4 and the air pump to the stamper S is completed can gradually be expanded by moving the nozzle 4 from a state in which the nozzle 4 presses a prescribed part. COPYRIGHT: (C)2005,JPO&NCIPI