| 摘要 |
PROBLEM TO BE SOLVED: To provide a cooling device and a cooling method which can maintain a temperature of an optical member constant without generating any uneven temperature distribution inside the optical member causing deterioration of an image formation capability, and to provide an exposure device having the cooling device. SOLUTION: A thermostat for temperature controlling the optical member, includes a primary radiating member which gives and receives a radiant heat between predetermined regions of the optical member, and is provided with a primary radiating mechanism controlling the temperature of the optical member by using the primary radiating member, and a shielding member reducing quantity of heat of the radiant heat transmitted to regions other than the predetermined region out of the radiant heat from the primary radiating member. COPYRIGHT: (C)2005,JPO&NCIPI
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