| 摘要 |
PROBLEM TO BE SOLVED: To provide a manipulator device which can prevent a part subjected to operations from being lowered in quality and yield by preventing dust from being dispersed in an atmosphere condition when works are carried out by means of driving arms in either one of a first atmosphere condition or a second atmosphere condition, which are different in nature. SOLUTION: A driving shaft 67 and the connecting portion of a second arm 62, and a driving shaft 60 and the connecting portion of a first arm 49, are hermetically closed by vacuum dust seals 71 and 72. And a driving shaft 46 and a hollow supporting members 41 are also hermetically closed by vacuum seals 74 and 75, the second arm 62, the driving shaft 60, the first arm 49 and the hollow supporting member 41 are communicated with one another through through-holes 77, 76, 49a, 60a, and 62a, and piping and a vacuum pump are provided, which adjust the pressure of the through holes 77, 76, 49a, 60a and 62a in such a way as to be equivalent to a third atmosphere condition where the pressure is set up to a specified range with respect to the pressure in a vacuum chamber. |
